M'makampani amakono opanga semiconductor, plasma etcher ndi turbomolecular pump ndi matekinoloje awiri ofunikira.A plasma etcher ndi chida chofunikira popanga zida za microelectronic, pomwe pampu ya turbomolecular idapangidwa kuti ikhale vacuum yayikulu komanso kuthamanga kwambiri.M'nkhaniyi, tikambirana za udindo ndi kufunikira kwa mapampu a turbomolecular mu plasma etchers.
Zamkatimu
1. Mfundo yogwiritsira ntchito makina a plasma etching
2. Mfundo yogwiritsira ntchito pampu ya turbomolecular
3. Kugwiritsa ntchito pampu ya turbomolecular mu makina a plasma etching
4. Ubwino ndi zoperewera za mapampu a turbomolecular
5. Mapeto
1. Mfundo yogwiritsira ntchito makina a plasma etching:
A plasma etcher ndi chida chopangira zinthu pogwiritsa ntchito madzi a m'magazi m'chipinda chopulumutsira.Plasma ndi gulu la tinthu ting'onoting'ono topangidwa ndi ionization ya gasi.Kachulukidwe ndi mayendedwe a plasma amatha kuwongoleredwa ndi minda yamagetsi yamagetsi kapena maginito.Pa plasma etching, plasma imagunda pamwamba pa chinthu chogwirira ntchito ndikuchichotsa kapena kuchichotsa, ndikupanga mawonekedwe omwe akufuna.
Komabe, mpweya wambiri wotulutsa utsi umapangidwa panthawi ya plasma etching.Mipweya yowonongekayi imaphatikizapo zipangizo zogwirira ntchito ndi zonyansa mu gasi, ndi zina zotero, zomwe ziyenera kutulutsidwa kudzera mu vacuum system.Chifukwa chake, makina ojambulira a plasma amafunikira makina otsekemera kuti atsimikizire kukhazikika komanso kulondola kwa njira yolumikizira.
2. Mfundo yogwiritsira ntchito pampu ya turbomolecular:
Mapampu a turbomolecular ndi amodzi mwamapampu omwe amagwiritsidwa ntchito kwambiri pakupopa kwambiri pamakina owuzira.Zimagwira ntchito pozungulira zida zozungulira kwambiri kuti zipope gasi kuchokera muchipinda chochotsera mpweya ndikutulutsa mpweya mumlengalenga.Mu pampu ya turbomolecular, gasi amayamba kulowa mu mpope wochirikiza komwe amakanikizidwa kudera lopanikizika kwambiri asanatumizidwe ku pampu ya turbomolecular.
Mu mpope wa turbomolecular, mpweya umaponyedwa kudzera mu choyikapo chozungulira, pamene pampu ya molekyulu mpweya umaphwanyidwa kukhala mamolekyu ang'onoang'ono.Mapampu a turbomolecular amatha kupereka mpweya wambiri, ndipo kuthamanga kwawo kumafikira 500 ~ 6000 L / s.Kwa makina opangira plasma omwe amafunikira vacuum yayikulu, mapampu a turbomolecular ndi gawo lofunikira.
3. Kugwiritsa ntchito pampu ya turbomolecular mu plasma etching machine:
Mapampu a turbomolecular amagwiritsidwa ntchito kwambiri pamakina a plasma etching.Mu vacuum system yamakina a plasma etching, pampu ya turbomolecular nthawi zambiri imagwiritsidwa ntchito ngati pampu yayikulu kuthandiza kukwaniritsa vacuum yayikulu.Madzi a m'madzi a m'magazi akagunda pamwamba, amatulutsa mpweya wochuluka kwambiri, kuphatikizapo zotsalira zotsalira ndi mankhwala.Mipweya yotulutsayi imayenera kutulutsidwa m'chipinda chopulumutsira mwachangu komanso moyenera kuti zitsimikizire kukhazikika ndi kudalirika kwa njira ya plasma etching.
Liwiro lopopa kwambiri komanso mpweya wochuluka wa mapampu a turbomolecular amawapangitsa kukhala mapampu abwino.Mu etcher ya plasma, pampu ya turbomolecular nthawi zambiri imayikidwa mugawo losiyana la mpope kuti athe kuwongolera mosavuta vacuum ndi kukakamiza.Pa nthawi yomweyo, pofuna kuteteza turbomolecular mpope, m'pofunika kukhazikitsa wosanjikiza wa mpope makina ndi valavu kuchepetsa kuthamanga kutsogolo kwa turbomolecular mpope kupewa kupanikizika kwambiri ndi kuwonongeka kwa mpope turbomolecular.
4. Ubwino ndi malire a mapampu a turbomolecular:
Mapampu a turbomolecular ali ndi zabwino zambiri, monga kuthamanga kwamphamvu, vacuum yayikulu, phokoso lochepa, komanso kudalirika kwakukulu.Kuthamanga kwakukulu kwa mpope wa turbomolecular kumatha kuonjezera digiri ya vacuum, ndipo panthawi imodzimodziyo kungachepetse nthawi yopopera, potero kuonjezera kupanga bwino.Phokoso lochepa komanso kudalirika kwakukulu kwa pampu ya turbomolecular ndi imodzi mwa ubwino wake, zomwe zikutanthauza kuti pampu ya turbomolecular imatha kugwira ntchito bwino kwa nthawi yaitali, kuchepetsa chiwerengero cha kukonzanso ndi kubwezeretsa.
Komabe, mapampu a turbomolecular alinso ndi zoletsa zina, monga kupopera pang'ono kwa mpweya wina.Mwachitsanzo, mapampu a turbomolecular ali ndi mphamvu zochepa zotulutsa haidrojeni, ndipo mapampu a turbomolecular alinso ndi zofunika zina pakuthamanga kwa gasi ndi kutentha.Chifukwa chake, pazogwiritsa ntchito, ndikofunikira kusankha mtundu ndi magawo ogwirira ntchito a pampu ya turbomolecular molingana ndi momwe zilili kuti zitsimikizire kuti zimagwira ntchito bwino komanso moyenera.
5. Mapeto:
Popanga semiconductor, makina opangira plasma ndi chimodzi mwazinthu zofunika kwambiri.Mu makina otsekemera a plasma etching makina, pampu ya turbomolecular, monga pampu yayikulu, imagwira ntchito yofunikira kwambiri pakukwaniritsa njira yotsekemera komanso yokhazikika ya plasma.Mapampu a turbomolecular ali ndi liwiro la kupopera kwakukulu, vacuum yayikulu, phokoso lochepa komanso kukhathamiritsa kuti akwaniritse zofunikira zaukadaulo.
Nthawi zambiri, gawo la mpope wa turbomolecular mu makina opangira plasma ndi osasinthika.M'makampani opanga semiconductor, pampu ya turbomolecular yakhala imodzi mwa zida zofunika, zomwe zimagwira ntchito yofunika kwambiri pakuwonetsetsa kuti makina a plasma etching akugwira ntchito komanso kukhazikika.Ndi chitukuko chosalekeza komanso kupita patsogolo kwaukadaulo wa semiconductor, kufunikira ndi kuchuluka kwa kugwiritsa ntchito mapampu a turbomolecular kupitilira kukula.Chifukwa chake, opanga mapampu a turbomolecular amayenera kupititsa patsogolo magwiridwe antchito ndi mtundu wawo mosalekeza kuti akwaniritse zomwe makampani opanga ma semiconductor amafuna kuti azigwira ntchito kwambiri komanso zida zokhazikika.
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Nthawi yotumiza: Oct-20-2023