Muindasitiri yemazuva ano yekugadzira semiconductor, plasma etcher uye turbomolecular pombi ndiwo maviri akakosha matekinoroji.A plasma etcher chishandiso chakakosha mukugadzira zvinhu zvemicroelectronic, nepo turbomolecular pombi yakagadzirirwa vacuum yakakwirira uye yakakwirira yekupomba.Muchikamu chino, tinokurukura basa uye kukosha kwemapombi e turbomolecular mu plasma etchers.
Content
1. Kushanda musimboti weplasma etching muchina
2. Kushanda musimboti we turbomolecular pombi
3. Kushandiswa kwepombi ye turbomolecular mu plasma etching machine
4. Zvakanakira uye zvisingakwanisi turbomolecular pombi
5. Mhedziso
1. Kushanda musimboti weplasma etching muchina:
A plasma etcher chishandiso chekugadzirisa zvinhu nekushandisa plasma mukamuri yekutsvaira.Plasma muunganidzwa wezvimedu zvinochaja zvinogadzirwa negasi ionization.Kuwanda uye kutungamira kwekufamba kweplasma kunogona kudzorwa nepamusoro-frequency magetsi kana magineti minda.Munguva yeplasma etching, plasma inorova pamusoro pechinhu chinoshanda uye inoisimudza kana kuibvisa, ichigadzira chimiro chinodiwa.
Nekudaro, huwandu hukuru hwemhepo yekupedza gasi inogadzirwa panguva yeplasma etching.Aya magasi ekupedza anosanganisira zvinhu zvekushanda uye tsvina mugasi, nezvimwewo, izvo zvinoda kubudiswa kuburikidza ne-vacuum system.Naizvozvo, iyo plasma etching muchina inoda inoshanda vacuum system kuti ive nechokwadi chekugadzikana uye nekurongeka kweiyo etching maitiro.
2. Kushanda musimboti we turbomolecular pombi:
Mapombi eTurbomolecular ndeimwe yeanonyanya kushandiswa ekupomba ekumhanyisa mapombi muvacuum system.Inoshanda nekutenderedza seti yezvinomhanyisa-kumhanya zvinotenderedza kupomba gasi kubva mukamuri yekutsvaira uye kuburitsa gasi mumhepo.Mupombi ye turbomolecular, gasi rinotanga rapinda pombi inotsigira kwainomanikidzwa kupinda munzvimbo ine simba guru isati yatumirwa kune turbomolecular pump.
Mune turbomolecular pombi, gasi rinopomba kuburikidza neinotenderera impeller, nepo mune molecular pombi gasi rinoputsika kuita mamorekuru madiki.Turbomolecular pombi inogona kupa yakakwira vacuum, uye yavo yekupomba kumhanya inogona kusvika 500 ~ 6000 L/s.Kune michina yeplasma etching inoda yakakwira vacuum, turbomolecular pombi chikamu chakakosha.
3. Kushandisa turbomolecular pombi muplasma etching muchina:
Turbomolecular pombi dzinoshandiswa zvakanyanya muplasma etching michina.Mune vacuum system yemuchina weplasma etching, pombi ye turbomolecular inowanzo shandiswa sepombi huru kubatsira kuwana vacuum yakakwirira.Kana iyo plasma inorova pamusoro, inoburitsa huwandu hukuru hwemhepo yekuburitsa, kusanganisira zvakasara zvekushandisa uye zvigadzirwa zvemakemikari reaction.Aya magasi emhepo anofanirwa kudhonzwa kubva mukamuri yekutsvaira nekukurumidza uye nemazvo kuti ive nechokwadi chekugadzikana uye kuvimbika kweiyo plasma etching process.
Kumhanya kwekupomba kwepamusoro uye vacuum yakakwirira yemapombi eturbomolecular inoita kuti ive pombi dzakakodzera.Mune plasma etcher, iyo turbomolecular pombi inowanzoiswa mune yakaparadzana pombi unit kuitira nyore kudzora kwevacuum nekumanikidza.Panguva imwecheteyo, kuitira kuchengetedza pombi ye turbomolecular, zvakakosha kuisa mutsara wepombi yemagetsi uye kuvhara kwevhavha yekudzikisa pamberi pepombi ye turbomolecular kudzivirira kudzvinyirira kwakanyanya uye kukanganisa kwepombi ye turbomolecular.
4. Zvakanakira uye zvisingakwanisi turbomolecular pombi:
Mapombi eTurbomolecular ane akawanda mabhenefiti, akadai sekumhanya kwekupomba, high vacuum, ruzha rwakaderera, uye kuvimbika kwakanyanya.Iyo yakakwira yekupomba yekumhanyisa yepombi ye turbomolecular inogona kuwedzera iyo vacuum degree, uye panguva imwechete inogona kuderedza nguva yekupomba, nekudaro ichiwedzera kugadzirwa kwakanaka.Iyo yakaderera ruzha uye yakakwirira kuvimbika kwepombi ye turbomolecular zvakare chimwe chezvakanakira, izvo zvinoreva kuti iyo turbomolecular pombi inogona kuchengetedza kushanda kwakanaka kwenguva yakareba, kuderedza nhamba yekuchengetedza uye kutsiva.
Nekudaro, mapombi e turbomolecular anewo zvimwe zvinogumira, senge kuderera kwekupomba kwemamwe magasi.Semuyenzaniso, mapombi eturbomolecular ane yakaderera kudhirowa kwehydrogen, uye turbomolecular pombi inewo zvimwe zvinodiwa pakumanikidza gasi uye tembiricha.Naizvozvo, mumashandisirwo anoshanda, zvinodikanwa kuti usarudze mhando uye maparamendi ekushanda epombi ye turbomolecular zvinoenderana nemamiriro ezvinhu chaiwo kuti ive nechokwadi chekushanda kwayo kwakajairika.
5. Mhedziso:
Mukuita semiconductor yekugadzira, muchina weplasma etching ndeimwe yemidziyo yakakosha.Mune vacuum system yemuchina weplasma etching, iyo turbomolecular pombi, sepombi huru, inoita basa rakakosha mukuwana yakakwira vacuum uye yakagadzikana plasma etching process.Mapombi eTurbomolecular ane kukurumidza kupomba, yakakwira vacuum, yakaderera ruzha uye optimization kusangana nepamusoro tekinoroji zvinodiwa.
Kazhinji kutaura, basa repombi ye turbomolecular mumushini weplasma etching haidzoreki.Muindasitiri yekugadzira semiconductor, iyo turbomolecular pombi yave imwe yemidziyo inodiwa, iyo inoita basa rakakosha mukuona kuita uye kugadzikana kweplasma etching muchina.Nekuenderera mberi kwekusimudzira uye kufambira mberi kweiyo semiconductor tekinoroji, kudiwa uye chiyero chekushandiswa kwemapombi eturbomolecular chicharamba chichiwedzera.Naizvozvo, vagadziri vepombi ye turbomolecular vanofanirwa kuenderera mberi nekuvandudza mashandiro echigadzirwa uye mhando kuti isangane neiyo semiconductor yekugadzira indasitiri yekuda kwekuita kwepamusoro uye yakagadzikana michina.
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Nguva yekutumira: Oct-20-2023