Embonini yanamuhla yokukhiqiza i-semiconductor, i-plasma etcher kanye nepompo ye-turbomolecular zobuchwepheshe obubalulekile obubili.I-plasma etcher iyithuluzi elibalulekile ekwakhiweni kwezingxenye ze-microelectronic, kuyilapho iphampu ye-turbomolecular yakhelwe ukuvaleka okuphezulu kanye nesivinini sokumpompa.Kulesi sihloko, sixoxa ngendima nokubaluleka kwamaphampu e-turbomolecular kuma-plasma etchers.
Okuqukethwe
1. Umgomo wokusebenza womshini wokufaka i-plasma
2. Isimiso sokusebenza sephampu ye-turbomolecular
3. Ukusetshenziswa kwepompo ye-turbomolecular emshinini wokufaka i-plasma
4. Izinzuzo kanye nemikhawulo yamaphampu e-turbomolecular
5. Isiphetho
1. Umgomo wokusebenza womshini wokufaka i-plasma:
I-plasma etcher iyithuluzi lokucubungula izinto ngokusebenzisa i-plasma ekamelweni le-vacuum.I-Plasma iqoqo lezinhlayiya ezikhokhiswayo ezikhiqizwa i-ionization yegesi.Ukuminyana nokuqondiswa kokunyakaza kwe-plasma kungalawulwa yizindawo zikagesi ezinemvamisa ephezulu noma kazibuthe.Phakathi ne-plasma etching, i-plasma ishaya ingaphezulu lempahla yokusebenza futhi iyisuse noma iyiqede, idale isakhiwo esifiswayo.
Kodwa-ke, inani elikhulu legesi yokukhipha lenziwa ngesikhathi sokufakwa kwe-plasma.Lawa magesi aphumayo ahlanganisa izinto zokusebenza kanye nokungcola kwegesi, njll., okudingeka kukhishwe ngohlelo lwe-vacuum.Ngakho-ke, umshini wokufaka i-plasma udinga uhlelo olusebenzayo lwe-vacuum ukuqinisekisa ukuzinza nokunemba kwenqubo yokufaka.
2. Umgomo wokusebenza wephampu ye-turbomolecular:
Amaphampu e-Turbomolecular angenye yamaphampu esivinini sokumpompa aphezulu asetshenziswa kakhulu kumasistimu we-vacuum.Isebenza ngokuphotha isethi yama-impeller ajikelezayo anesivinini esikhulu ukupompa igesi ngaphandle kwegumbi le-vacuum futhi ikhiphele igesi emkhathini.Kupompo ye-turbomolecular, igesi iqala ingena empompini esekelayo lapho icindezelwa khona ibe yisifunda somfutho omkhulu ngaphambi kokuba ithunyelwe kupompo ye-turbomolecular.
Kupompo ye-turbomolecular, igesi impontshwa nge-impeller ejikelezayo, kuyilapho empompini yamangqamuzana igesi ihlukaniswa ibe ama-molecule amancane.Amaphampu e-Turbomolecular anganikeza i-vacuum ephezulu, futhi isivinini sawo sokupompa singafinyelela ku-500 ~ 6000 L/s.Emishinini yokufaka i-plasma edinga i-vacuum ephezulu, amaphampu e-turbomolecular ayingxenye ebaluleke kakhulu.
3. Ukusetshenziswa kwepompo ye-turbomolecular emshinini wokufaka i-plasma:
Amaphampu e-Turbomolecular asetshenziswa kakhulu emishinini yokufaka i-plasma.Ohlelweni lwe-vacuum lomshini wokufaka i-plasma, iphampu ye-turbomolecular ivamise ukusetshenziswa njengephampu eyinhloko ukusiza ukuzuza i-vacuum ephezulu.Lapho i-plasma ifika phezulu, ikhiqiza igesi ephumayo eningi, okuhlanganisa izinto ezingavuthiwe ezisele kanye nemikhiqizo yokusabela kwamakhemikhali.Lawa magesi e-exhaust adinga ukumpontshelwa ngaphandle kwegumbi le-vacuum ngokushesha nangokuphumelelayo ukuze kuqinisekiswe ukuzinza nokuthembeka kwenqubo yokufaka i-plasma.
Isivinini sokumpompa okuphezulu kanye ne-vacuum ephezulu yamaphampu e-turbomolecular kuwenza abe amaphampu afanelekile.Ku-plasma etcher, iphampu ye-turbomolecular ngokuvamile ifakwa kuyunithi yepompo ehlukile ukuze kulawulwe kalula i-vacuum nokucindezela.Ngesikhathi esifanayo, ukuze kuvikelwe iphampu ye-turbomolecular, kuyadingeka ukufaka ungqimba lwepompo lomshini kanye ne-valve yokunciphisa ingcindezi phambi kwepompo ye-turbomolecular ukugwema ukucindezela okukhulu kanye nokulimala kwepompo ye-turbomolecular.
4. Izinzuzo kanye nemikhawulo yamaphampu e-turbomolecular:
Amaphampu e-Turbomolecular anezinzuzo eziningi, njengesivinini sokumpompa, i-vacuum ephezulu, umsindo ophansi, nokuthembeka okuphezulu.Ijubane eliphezulu lokupompa lephampu ye-turbomolecular lingakhuphula izinga le-vacuum, futhi ngesikhathi esifanayo linganciphisa isikhathi sokupompa, ngaleyo ndlela kwandise ukusebenza kahle kokukhiqiza.Umsindo ophansi nokuthembeka okuphezulu kwepompo ye-turbomolecular nakho kungenye yezinzuzo zayo, okusho ukuthi iphampu ye-turbomolecular ingagcina ukusebenza kahle isikhathi eside, ukunciphisa inani lokugcinwa nokushintshwa.
Kodwa-ke, amaphampu e-turbomolecular nawo anemikhawulo ethile, njengokusebenza okuphansi kokumpompa kwamagesi athile.Isibonelo, amaphampu e-turbomolecular anokusebenza okuphansi kokukhipha i-hydrogen, futhi amaphampu e-turbomolecular nawo anezidingo ezithile zokucindezela kwegesi nezinga lokushisa.Ngakho-ke, ekusetshenzisweni okusebenzayo, kuyadingeka ukukhetha uhlobo kanye nemingcele yokusebenza yepompo ye-turbomolecular ngokuya ngesimo esithile ukuze kuqinisekiswe ukusebenza kwayo okujwayelekile nokusebenza kahle.
5. Isiphetho:
Enqubweni yokukhiqiza i-semiconductor, umshini wokufaka i-plasma ungomunye wemishini ebaluleke kakhulu.Ohlelweni lwe-vacuum lomshini wokufaka i-plasma, iphampu ye-turbomolecular, njengepompo eyinhloko, idlala indima ebalulekile ekuzuzeni i-vacuum ephezulu kanye nenqubo yokuzinza ye-plasma etching.Amaphampu e-Turbomolecular anejubane eliphezulu lokumpompa, i-vacuum ephezulu, umsindo ophansi kanye nokwenza kahle ukuze ahlangabezane nezidingo zobuchwepheshe eziphakeme.
Ngokuvamile, indima yepompo ye-turbomolecular emshinini wokufaka i-plasma ayinakushintshwa.Embonini yokukhiqiza i-semiconductor, iphampu ye-turbomolecular isiphenduke enye yemishini edingekayo, edlala indima ebalulekile ekuqinisekiseni ukusebenza nokuzinza komshini wokufaka i-plasma.Ngokuthuthuka okuqhubekayo kanye nenqubekelaphambili yobuchwepheshe be-semiconductor, isidingo kanye nobubanzi bokusetshenziswa kwamaphampu e-turbomolecular kuzoqhubeka nokukhula.Ngakho-ke, abakhiqizi bephampu ye-turbomolecular badinga ukuqhubeka bethuthukisa ukusebenza komkhiqizo kanye nekhwalithi ukuze bahlangabezane nesidingo somkhakha wokukhiqiza we-semiconductor sokusebenza okuphezulu kanye nemishini ezinzile.
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Isikhathi sokuthumela: Oct-20-2023